Denk, W., and C. Xu.
“Method and Apparatus for Imaging Semiconductor Devices” US Patent 6,316,950. (November 13, 2001) >>> Link
Method and Apparatus for Imaging Semiconductor Devices
Applied and Engineering Physics, Cornell University
Applied and Engineering Physics, Cornell University
Denk, W., and C. Xu.
“Method and Apparatus for Imaging Semiconductor Devices” US Patent 6,316,950. (November 13, 2001) >>> Link